Scientific Researches
MEMS piezoelectric mirror and fast steering mirrors have wide applications in numerous scientific research fields, playing a pivotal role across various domains.
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Precise Measurement and Metrology
When combined with many traditional instruments, MEMS FSM not only enable the miniaturization and portability of measurement equipment but also provide fast and accurate measurement solutions. For instance, the seamless integration of FSMs with cameras has given birth to advanced 3D metrology solutions, fulfilling the demands for high-precision processing and inspection. Furthermore, in the field of biological research, FSMs can assist single-point detection systems to achieve high-resolution imaging of microstructures such as cells.
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Optical System Calibration
Fast steering mirrors also play a crucial role in the calibration and testing of optical systems. They are capable of adjusting the optical path in real-time, achieving functions such as auto-focusing and optical path disturbance resistance, thereby ensuring the stability and accuracy of the optical system. This is of great significance for improving the performance of optical instruments and reducing errors.
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Tracking and Aiming
In target tracking and aiming systems, MEMS FSM can ensure that the system always points towards the detected or stimulated target by precisely controlling the optical path, achieving fast and accurate tracking and aiming. This characteristic has broad application prospects in various research fields such as military, aerospace, industrial automation, and more.

